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CANON FPA-3000 iW Fine Pattern Aligner

CANON FPA-3000 iW Fine Pattern Aligner

CANON FPA-3000 iW Fine Pattern Aligner For Sale

Contact for pricing and inspection. 

Equipment is currently installed in FAB, and can be viewed upon request.

 
 

DETAILS:

Wafer size: 4" / 6" / 8" (customer may specify per their requirement)

Reticle size:  6" Square

Throughput: 115 wph (14 shot / 50mm / 8” Wafer)    ;   120 wph (9 shot / 50mm / 6" Wafer)

General Specification and Information:

• Model:  FPA 3000 iw

• Lens Type:  UL51

• Stage Type:  ABS (Air Guided Bearing)

• Chamber Type:  CD80

Projection Optics:

• Projection Magnification: 1/2 X

• Exposure Light: 365nm

• Numerical Aperture:  0.24

• Field Size:  50X50mm ~ 47.9~52.0mm

Standard Illumination:

• Exposure Light:  i-Line

• Light Source:  2.0KW Super High Pressure Hg Lamp

• Intensity:  >2500W/m2

• Uniformity:  < 1.2%

• Masking Blade:  4 blades independent               (1.0X1.0mm~52X52mm on wafer)

Printing Performance:

• Resolution:  <0.8µm

• Depth of Focus:  >4.0µm

• Image Field Deviation:  <2.5µm

• Distortion:  <±0.11µm

Focus/Leveling Performance:

• Focus Repeatability:  <0.10µm (3sigma)

• Leveling Repeatability:  <7ppm (3sigma)

• Minimum Compensation:  Range >100ppm

Wafer Alignment Performance:

• Lighting Source:  He-Ne Laser, Broad Band(Halogen Lamp)

• Signal Process:  TV Image Processing

• System:  Off Axis TTL

• Mode:  AGA

 

Standard Stage Specification:

• Step Accuracy:  <0.05µm (3sigma)

• Scaling:  <±1.0ppm

• Orthogonality:  <±1.0ppm

 

Standard Alignment Specification:

• Reticle Rotation Accuracy:  <±0.02µm

• Wafer Alignment:  <0.10µm mean + 3sigma

• Reticle Rotation Repeatability:  <0.05µm)

 

 

Includes: (1) CANON FPA-3000 iW Fine Pattern Aligner

For sale: CANON FPA-3000 iW Fine Pattern Aligner. Selling "as is, where is." We do not have the ability to test all equipment. This system was de-installed in working, operational condition.

 

PRICES MAY VARY DUE TO AVAILABILITY / CUSTOMER REQUIREMENTS.

PLEASE CALL OR EMAIL FOR FORMAL QUOTATION.

 

CANON FPA-3000 iW Fine Pattern Aligner For Sale

Contact for pricing and inspection. 

Equipment is currently installed in FAB, and can be viewed upon request.