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APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM
APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM
APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM
Condition: Used
Brand: Applied Materials
Model: Varasem 3D Automated CD Metrology System
Includes: (1) Used Applied Materials (AMAT) Varasem 3D Automated CD Metrology System
Wafer Specification
Wafer Size: 200MM
Wafer Shape: SNNF (Semi Notch No Flat)
Wafer : 6”, 8” or 12”
Electron Optical System
Electron Gun Schottky emission source (fei)
Accelerating voltage 300V to 2000V
Probe Current Low 5pA / Medium 10pA / High 20pA
Electromagnetic Lens 3 Stage Electromagnetic Lens
System with boosting voltage Beam Deflector Module
Objective Lens
Scan Coil 2-Stage Electromagnetic Deflection (X- and Y-Axes)
Magnification 1,000x to 400,000x (100um to 0.25um FOV)
Wafer imaging ability Entire surface of 8” wafer
Asspect Ratio >14 : 1
Tilt Function 5 degrees (4 Direction)
Resolution 3nm (500V)
SECS/GEM Communication Interface
Automated Image Archiving Function Always / Online Setup / Never
Measurement Function Average/Maximum/Minimum/Contact Hole/
Line Edge Analysis/CH Analysis/Slope
Measurement Algorithm Normal / Foot / Threshold
For sale: APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM (Used). Selling "as is, where is." We do not have the ability to test all equipment. This system was de-installed in working, operational condition.
PRICES MAY VARY DUE TO AVAILABILITY / CUSTOMER REQUIREMENTS.
PLEASE CALL OR EMAIL FOR FORMAL QUOTATION.