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Inventory

We supply quality used scientific laboratory and industrial equipment. All of our equipment is guaranteed with a 30 day right of return; Return an item for any reason. Purchase directly with a formal invoice or through eBay. 

View our inventory HERE

APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM

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APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM

175,000.00

APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM

Condition: Used

Brand: Applied Materials

Model: Varasem 3D Automated CD Metrology System

Includes: (1) Used Applied Materials (AMAT) Varasem 3D Automated CD Metrology System

Wafer Specification

  • Wafer Size: 200MM

  • Wafer Shape: SNNF (Semi Notch No Flat)

  • Wafer : 6”, 8” or 12”

Electron Optical System

  • Electron Gun Schottky emission source (fei)

  • Accelerating voltage 300V to 2000V

  • Probe Current Low 5pA / Medium 10pA / High 20pA

  • Electromagnetic Lens 3 Stage Electromagnetic Lens

  • System with boosting voltage Beam Deflector Module

Objective Lens

  • Scan Coil 2-Stage Electromagnetic Deflection (X- and Y-Axes)

  • Magnification 1,000x to 400,000x (100um to 0.25um FOV)

  • Wafer imaging ability Entire surface of 8” wafer

  • Asspect Ratio >14 : 1

  • Tilt Function 5 degrees (4 Direction)

  • Resolution 3nm (500V)

SECS/GEM Communication Interface

  • Automated Image Archiving Function Always / Online Setup / Never

  • Measurement Function Average/Maximum/Minimum/Contact Hole/

  • Line Edge Analysis/CH Analysis/Slope

  • Measurement Algorithm Normal / Foot / Threshold

For sale: APPLIED MATERIALS (AMAT) VERASEM 3D AUTOMATED CD METROLOGY SYSTEM (Used). Selling "as is, where is." We do not have the ability to test all equipment. This system was de-installed in working, operational condition.

 

PRICES MAY VARY DUE TO AVAILABILITY / CUSTOMER REQUIREMENTS.

PLEASE CALL OR EMAIL FOR FORMAL QUOTATION.

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