CANON FPA-3000 iW Fine Pattern Aligner
CANON FPA-3000 iW Fine Pattern Aligner
CANON FPA-3000 iW Fine Pattern Aligner For Sale
Contact for pricing and inspection.
Equipment is currently installed in FAB, and can be viewed upon request.
DETAILS:
Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size: 6" Square
Throughput: 115 wph (14 shot / 50mm / 8” Wafer) ; 120 wph (9 shot / 50mm / 6" Wafer)
General Specification and Information:
• Model: FPA 3000 iw
• Lens Type: UL51
• Stage Type: ABS (Air Guided Bearing)
• Chamber Type: CD80
Projection Optics:
• Projection Magnification: 1/2 X
• Exposure Light: 365nm
• Numerical Aperture: 0.24
• Field Size: 50X50mm ~ 47.9~52.0mm
Standard Illumination:
• Exposure Light: i-Line
• Light Source: 2.0KW Super High Pressure Hg Lamp
• Intensity: >2500W/m2
• Uniformity: < 1.2%
• Masking Blade: 4 blades independent (1.0X1.0mm~52X52mm on wafer)
Printing Performance:
• Resolution: <0.8µm
• Depth of Focus: >4.0µm
• Image Field Deviation: <2.5µm
• Distortion: <±0.11µm
Focus/Leveling Performance:
• Focus Repeatability: <0.10µm (3sigma)
• Leveling Repeatability: <7ppm (3sigma)
• Minimum Compensation: Range >100ppm
Wafer Alignment Performance:
• Lighting Source: He-Ne Laser, Broad Band(Halogen Lamp)
• Signal Process: TV Image Processing
• System: Off Axis TTL
• Mode: AGA
Standard Stage Specification:
• Step Accuracy: <0.05µm (3sigma)
• Scaling: <±1.0ppm
• Orthogonality: <±1.0ppm
Standard Alignment Specification:
• Reticle Rotation Accuracy: <±0.02µm
• Wafer Alignment: <0.10µm mean + 3sigma
• Reticle Rotation Repeatability: <0.05µm)
Includes: (1) CANON FPA-3000 iW Fine Pattern Aligner
For sale: CANON FPA-3000 iW Fine Pattern Aligner. Selling "as is, where is." We do not have the ability to test all equipment. This system was de-installed in working, operational condition.
PRICES MAY VARY DUE TO AVAILABILITY / CUSTOMER REQUIREMENTS.
PLEASE CALL OR EMAIL FOR FORMAL QUOTATION.
CANON FPA-3000 iW Fine Pattern Aligner For Sale
Contact for pricing and inspection.
Equipment is currently installed in FAB, and can be viewed upon request.