Novellus Concept-1 200 PECVD S/N E100311A

- Concept One 200mm Base System

- Micro-Contamination Package.

- Dual Frequency System with AE LF PDX 1400 Generator - CE Mark.

- New Generation Process 200mm Gas Box, 11 Chanel, Aera FCPA digital Mfc's with LOTO's.

- Standard Slot 200mm Heater Block.

- Assy, Foot Switch Controller - switch is foot activated for closure of the loadlock door.

- VCR Gasoline Interconnect.

- Upgraded External Heated Pendulum Valve

- Upgraded 586 Computer with Flash Drive.

- Upgraded Digital Pressure/ Temperature Control Unit.

- Upgraded Robot with 70V Motors and OEM 750.

- Upgraded Front Flat Panel Touchscreen.

- Upgraded AC and RF Ceramic Feedthru's.

- Upgraded Ferrofluidic Spindle.

- Upgraded AE Matching Network.

- Upgraded RF Detector Endpoint System.

- Upgraded RF Enclosure.

- Cooling Station For Plastic Cassette Compatibility.

- Megapak Power Supply.

- Sapphire Window.

- One Piece Loadlock Door Shaft.

- Standard Front Facia - Aqueous paint.

- SECS II communications interface.

- AE RFG5500 HF Generator - CE Marked, interlock standard.

- AC Remote Pump Interface for ACP pumps and with AE LF Generator.

- Main System Control Cable CA 99 - TBD

- RF Generator Control Cables for AE Generators - TBD

- HF RF Cable for 3 KW generator CA 57 - TBD

- LF RF Cable CA 102 -TBD

- Pump Control Cable to be used with ACP type interfaces - TBD

Condition: Used

Brand: Novellus

Model: Concept-1 200 PECVD S/N E100311A

Includes: (1) Used Novellus Concept-1 200 PECVD S/N E100311A

For sale: Novellus Concept-1 200 PECVD S/N E100311A (Used). Selling "as is, where is." We do not have the ability to test all equipment. This system was de-installed in working, operational condition.

PRICES MAY VARY DUE TO AVAILABILITY / CUSTOMER REQUIREMENTS.

PLEASE CALL OR EMAIL FOR FORMAL QUOTATION.